Fabrication of hierarchical anti-reflective structures using polystyrene sphere lithography on an as-cut p-Si substrate

Published 2016 View Full Article

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Title
Fabrication of hierarchical anti-reflective structures using polystyrene sphere lithography on an as-cut p-Si substrate
Authors
Keywords
Antireflection coatings, Subwavelength structures, Polystyrene sphere lithography, Plasma dry etching
Journal
APPLIED SURFACE SCIENCE
Volume 377, Issue -, Pages 81-85
Publisher
Elsevier BV
Online
2016-03-23
DOI
10.1016/j.apsusc.2016.03.105

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