Thermoelectric properties of Al-doped Mg 2 Si thin films deposited by magnetron sputtering

Published 2016 View Full Article

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Title
Thermoelectric properties of Al-doped Mg 2 Si thin films deposited by magnetron sputtering
Authors
Keywords
Mg, 2, Si base thin films, Al doping, Magnetron sputtering, Thermoelectric properties
Journal
APPLIED SURFACE SCIENCE
Volume 386, Issue -, Pages 389-392
Publisher
Elsevier BV
Online
2016-06-12
DOI
10.1016/j.apsusc.2016.06.041

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