Investigation on the mechanism of nitrogen plasma modified PDMS bonding with SU-8

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Title
Investigation on the mechanism of nitrogen plasma modified PDMS bonding with SU-8
Authors
Keywords
SU-8, PDMS, Nitrogen plasma treatment, Contact angle, FTIR, XPS, Pull-off test
Journal
APPLIED SURFACE SCIENCE
Volume 364, Issue -, Pages 815-821
Publisher
Elsevier BV
Online
2015-12-23
DOI
10.1016/j.apsusc.2015.12.153

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