Evolution of mechanically formed bow due to surface waviness and residual stress difference on sapphire (0001) substrate

Title
Evolution of mechanically formed bow due to surface waviness and residual stress difference on sapphire (0001) substrate
Authors
Keywords
Sapphire, Machining process, Residual stress, Bow, HR-XRD, Raman spectroscopy
Journal
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 269, Issue -, Pages 102-108
Publisher
Elsevier BV
Online
2019-02-05
DOI
10.1016/j.jmatprotec.2019.02.003

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