Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides
Published 2016 View Full Article
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Title
Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 109, Issue 3, Pages 033110
Publisher
AIP Publishing
Online
2016-07-22
DOI
10.1063/1.4959564
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