Direct writing of Cu -based micro -temperature detectors using femtosecond laser reduction of CuO nanoparticles

Cu-based micro-temperature deteotors were fabricated femtosecond laser reduction of cuo nanoparticles. Cu-based microstructures was directly created by laser scanning on a CuO nanoparticle solution film. Cu-rich and cu(2)O-rich microstructures were selectively formed to electrically connect two Cu thin-film electrodes for use in temperature detectors were fabricated at scanning speeds of 500 and 1000 mu m/s, respectively, at apulse energy of 1.2 nJ. The temperature coefficient of resistance values of the Cu-rich and Cu2O-rich microstructures were positive and negative, respectively; these temperature behaviors are typical o metal and semiconductor materials, respectively (C) 2016 The Japan Societ of Applied physics