High-density BaTiO3–Cu composite films with optimized BaTiO3 matrix for embedded capacitors

Title
High-density BaTiO3–Cu composite films with optimized BaTiO3 matrix for embedded capacitors
Authors
Keywords
Embedded capacitor, Aerosol deposition, BaTiO, 3, –Cu composite film, Low dielectric loss, Low leakage current, Areal capacitance
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-07-05
DOI
10.1016/j.ceramint.2019.07.046

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