Laser assisted fabrication of micro-lens array and characterization of their beam shaping property

Published 2019 View Full Article

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Title
Laser assisted fabrication of micro-lens array and characterization of their beam shaping property
Authors
Keywords
CO, 2, laser, Femtosecond laser, Polishing, Micro-lens array, Flat-top laser beam, Selective patterning, Indium-tin-oxide, Fused silica glass
Journal
APPLIED SURFACE SCIENCE
Volume 479, Issue -, Pages 375-385
Publisher
Elsevier BV
Online
2019-02-16
DOI
10.1016/j.apsusc.2019.02.083

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