Study on the surface crystallization mechanism and inhibition method in the CMP process of aluminum alloy mirrors

Title
Study on the surface crystallization mechanism and inhibition method in the CMP process of aluminum alloy mirrors
Authors
Keywords
-
Journal
APPLIED OPTICS
Volume 58, Issue 22, Pages 6091
Publisher
The Optical Society
Online
2019-07-29
DOI
10.1364/ao.58.006091

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