Progress of coating stress compensation of silicon mirrors for Lynx x-ray telescope mission concept using thermal oxide patterning method

Title
Progress of coating stress compensation of silicon mirrors for Lynx x-ray telescope mission concept using thermal oxide patterning method
Authors
Keywords
-
Publisher
SPIE-Intl Soc Optical Eng
Online
2019-04-29
DOI
10.1117/1.jatis.5.2.021011

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