Investigation of mechanical and tribological properties of super-thick DLC films with different modulation ratios prepared by PECVD

Published 2019 View Full Article

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Title
Investigation of mechanical and tribological properties of super-thick DLC films with different modulation ratios prepared by PECVD
Authors
Keywords
-
Journal
Materials Research Express
Volume 6, Issue 8, Pages 086433
Publisher
IOP Publishing
Online
2019-05-04
DOI
10.1088/2053-1591/ab1f5d

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