4.6 Article

Low-Temperature Plasma Nitriding of Mini-/Micro-Tools and Parts by Table-Top System

Journal

APPLIED SCIENCES-BASEL
Volume 9, Issue 8, Pages -

Publisher

MDPI
DOI: 10.3390/app9081667

Keywords

plasma nitriding; micro-nozzle; micro-spring; nitrogen supersaturation; hardening; hydrophobicity; stiffness control

Funding

  1. MEXT

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Featured Application Surface modification of mini- and micro-nozzles for dispensing systems. Abstract Miniature products and components must be surface treated to improve their wear resistance and corrosion toughness. Among various processes, low-temperature plasma nitriding was employed to harden the outer and inner surfaces of micro-nozzles and to strengthen the micro-springs. A table-top nitriding system was developed even for simultaneous treatment of nozzles and springs. A single AISI316 micro-nozzle was nitrided at 673 K for 7.2 ks to have a surface hardness of 2000 HV0.02 and nitrogen solute content up to 10 mass%. In particular, the inner and outer surfaces of a micro-nozzle outlet were uniformly nitrided. In addition, the surface contact angle increased from 40 degrees for bare stainless steels to 104 degrees only by low-temperature plasma nitriding. A stack of micro-nozzles was simultaneously nitrided for mass production. Micro-springs were also nitrided to improve their stiffness for medical application.

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