Journal
2D MATERIALS
Volume 6, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/2053-1583/ab175c
Keywords
plasma-enhanced chemical vapor deposition; borocarbonitride; optical bandgap; electronic transport measurements; x-ray photoelectron spectroscopy; Raman spectroscopy; transmission electron microscopy
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Funding
- Spanish MINECO [FIS2014-61634-EXP, MAT2015-65203-R]
- 'Severo Ochoa' Programme for Centres of Excellence in RD (MINECO) [SEV-2016-0686]
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We report a direct and fast synthesis route to grow boron-carbon-nitrogen layers based on microwave-assisted plasma enhanced chemical vapour deposition (PECVD) by using methylamine borane as a single source molecular precursor. This easy and inexpensive method allows controlled and reproducible growth of B-C-N layers onto thin Cu foils. Their morphological, structural, chemical, optical and transport properties have been thoroughly characterized by a number of different microscopies, transport and spectroscopic techniques. Though disorder and segregation into C-rich and h-BN-rich domains have been observed in ultrathin flat few layers, high doping levels have been reached, inducing strong modifications of the electronic, optical and transport properties of C-rich and h-BN-rich phases. This synthesis procedure can open new routes towards the achievement of homogeneous highly mixed ternary B-C-N phases.
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