Journal
MATERIALS
Volume 12, Issue 10, Pages -Publisher
MDPI
DOI: 10.3390/ma12101690
Keywords
SiC ceramics; prediction of subsurface damages; vibration-assisted polishing; finite element simulation
Categories
Funding
- National Ministry of Science and Technology International Cooperation Project [2016YFE0105100]
- Micro-Nano and Ultra-Precision Key Laboratory of Jilin Province [20140622008JC]
- Science and Technology Development Projects of Jilin Province [20160101340JC, 20180623034TC, 20180201052GX, 20190201254JC, 20190201303JC, 20190302065GX]
- Jilin Provincial Education Department Scientific Research Planning Project [JJKH20181036KJ]
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Subsurface damages and surface roughness are two significant parameters which determine the performance of silicon carbide (SiC) ceramics. Subsurface damages (SSD) induced by conventional polishing could seriously affect the service life of the workpiece. To address this problem, vibration-assisted polishing (VAP) was developed to machine hard and brittle materials, because the vibration-assisted machine (VAM) can increase the critical cutting depth to improve the surface integrity of materials. In this paper, a two-dimensional (2D) VAM system is used to polish SiC ceramics. Moreover, a theoretical SSD model is constructed to predict the SSD. Furthermore, finite element simulation (FEM) is adopted to analyze the effects of different VAP parameters on SSD. Finally, a series of scratches and VAP experiments are conducted on the independent precision polishing machine to investigate the effects of polishing parameters on brittle-ductile transition and SSD.
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