Journal
TRIBOLOGY INTERNATIONAL
Volume 132, Issue -, Pages 75-84Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.triboint.2018.12.012
Keywords
Surface texturing; Core-shell nanostructures; Two-photon lithography; Atomic layer deposition
Categories
Funding
- US National Science Foundation (NSF) [CMS-1463306]
- Center for Advanced Systems and Engineering [OIA-1457888]
- Arkansas EPSCoR Program, ASSET III
- Arkansas Biosciences Institute
- University of Arkansas
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In this study, we demonstrated a novel strategy for fabricating deformation-resistant nano-textured surfaces. Ordered arrays of IP-DIP photoresist nanodots of various diameters were first fabricated using two-photon lithography. IP-DIP/Al2O3 core-shell nanostructures (CSNs) were then formed by conformally coating the nano-dots with Al2O3 of different thicknesses via atomic layer deposition (ALD). The CSNs showed 85% lower coefficients of friction than the bare IP-DIP nanodots and exhibited minimal nanostructure deformation at contact pressures greater than 20 GPa. The IP-DIP/Al2O3 CSNs also have lower adhesion forces than the bare IP-DIP nanodots. The excellent deformation resistance and superior tribological properties of these CSNs demonstrate that the combination of two-photon lithography and ALD is a very promising solution to tribological issues in miniaturized systems.
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