Journal
OPTICS EXPRESS
Volume 27, Issue 8, Pages 10456-10471Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.27.010456
Keywords
-
Categories
Funding
- Natural Sciences and Engineering Research Council of Canada (NSERC)
- Fonds de recherche du Quebec - Nature et technologies (FRQNT)
- CMC Microsystems
- Lumerical Solutions
- Advanced Micro Foundry (AMF)
Ask authors/readers for more resources
based on TiN metal and N++ doped silicon, in the same SOI process. The designs don't require special material processing, show negligible loss, and have very stable power consumption. The optimum TiN design has a switching power P.. 21.4 mW and a time constant.. 5.6 mu s, whereas P.. 22.8 mW and.. 2.2 mu s for the best N++ Si design, enabling 2.5x faster switching compared to the metal heater. Doped-Si-based heaters are therefore the most practical and efficient on standard SOI. In addition, to optimize the layout density of highly integrated dies, we experimentally characterize internal and external thermal crosstalk for tunable Mach-Zehnder interferometers (MZIs) based on both heater designs for various power, distances, and etching patterns. Deep trenches are the best structures not involving special fabrication techniques to mitigate heat leakage affecting phase-sensitive devices close to heaters. Given the numerous applications of thermal tuners, this work is relevant to almost all silicon photonics designers. (c) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available