Synthesis of nanostructured based carbon nanowalls at low temperature using inductively coupled plasma chemical vapor deposition (ICP-CVD)
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Title
Synthesis of nanostructured based carbon nanowalls at low temperature using inductively coupled plasma chemical vapor deposition (ICP-CVD)
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-05-11
DOI
10.1007/s00542-019-04463-7
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