Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment

Published 2019 View Full Article

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Title
Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment
Authors
Keywords
Pressure sensor, Porous structures, Microwave treatment, Polydimethylsiloxane (PDMS), Surface microstructure, Capacitance
Journal
MICROELECTRONIC ENGINEERING
Volume -, Issue -, Pages 111002
Publisher
Elsevier BV
Online
2019-05-21
DOI
10.1016/j.mee.2019.111002

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