Study on dynamic scaling of morphological evolution of TiO2 film deposited with different O2/Ar flow ratio

Published 2019 View Full Article

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Title
Study on dynamic scaling of morphological evolution of TiO2 film deposited with different O2/Ar flow ratio
Authors
Keywords
-
Journal
Micro & Nano Letters
Volume -, Issue -, Pages -
Publisher
Institution of Engineering and Technology (IET)
Online
2019-04-13
DOI
10.1049/mnl.2018.5742

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