Resistivity and surface scattering of (0001) single crystal ruthenium thin films

Published 2019 View Full Article

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Title
Resistivity and surface scattering of (0001) single crystal ruthenium thin films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 37, Issue 3, Pages 031516
Publisher
American Vacuum Society
Online
2019-05-15
DOI
10.1116/1.5093494

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