Formation of highly conformal spinel lithium titanate thin films based on a novel three-step atomic layer deposition process

Published 2019 View Full Article

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Title
Formation of highly conformal spinel lithium titanate thin films based on a novel three-step atomic layer deposition process
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 37, Issue 3, Pages 031508
Publisher
American Vacuum Society
Online
2019-04-18
DOI
10.1116/1.5082275

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