Evaluation of grating realized via pulse current electroplating combined with atomic layer deposition as an x-ray grating interferometer

Published 2019 View Full Article

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Title
Evaluation of grating realized via pulse current electroplating combined with atomic layer deposition as an x-ray grating interferometer
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 37, Issue 3, Pages 030903
Publisher
American Vacuum Society
Online
2019-04-02
DOI
10.1116/1.5080954

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