High frequency, low power, electrically actuated shape memory alloy MEMS bimorph thermal actuators

Title
High frequency, low power, electrically actuated shape memory alloy MEMS bimorph thermal actuators
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 29, Issue 7, Pages 075005
Publisher
IOP Publishing
Online
2019-04-05
DOI
10.1088/1361-6439/ab1633

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