Effect of additives on preparation of vertical holes in Si substrate using metal-assisted chemical etching

Published 2019 View Full Article

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Title
Effect of additives on preparation of vertical holes in Si substrate using metal-assisted chemical etching
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SD, Pages SDDF06
Publisher
Japan Society of Applied Physics
Online
2019-05-16
DOI
10.7567/1347-4065/ab0ff5

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