Fluorine and oxygen plasma exposure behavior of yttrium oxyfluoride ceramics

Published 2019 View Full Article

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Title
Fluorine and oxygen plasma exposure behavior of yttrium oxyfluoride ceramics
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SE, Pages SEEC01
Publisher
Japan Society of Applied Physics
Online
2019-05-30
DOI
10.7567/1347-4065/ab1636

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