Raman spectroscopic studies of stress-induced structure alteration in diamond-like carbon films

Published 2019 View Full Article

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Title
Raman spectroscopic studies of stress-induced structure alteration in diamond-like carbon films
Authors
Keywords
Diamond-like carbon, Thin films, Residual stress, Structure alteration, Vickers indentation, Raman spectroscopy
Journal
DIAMOND AND RELATED MATERIALS
Volume 94, Issue -, Pages 1-7
Publisher
Elsevier BV
Online
2019-02-16
DOI
10.1016/j.diamond.2019.02.020

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