The influence of crystal structure and the enhancement of mechanical and frictional property of titanium nitride film by addition of ruthenium

Title
The influence of crystal structure and the enhancement of mechanical and frictional property of titanium nitride film by addition of ruthenium
Authors
Keywords
RF magnetron sputtering, Titanium nitride, Ruthenium, Tribological properties
Journal
APPLIED SURFACE SCIENCE
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-05-23
DOI
10.1016/j.apsusc.2019.05.251

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