The mechanism study of mixed Ar/O2 plasma-cleaning treatment on niobium surface for work function improvement

Published 2018 View Full Article

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Title
The mechanism study of mixed Ar/O2 plasma-cleaning treatment on niobium surface for work function improvement
Authors
Keywords
Niobium, Hydrocarbon, Surface cleaning, Work function, Plasma, Oxide layer
Journal
APPLIED SURFACE SCIENCE
Volume 475, Issue -, Pages 143-150
Publisher
Elsevier BV
Online
2018-12-17
DOI
10.1016/j.apsusc.2018.12.156

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