CMOS-Compatible PECVD Silicon Carbide Platform for Linear and Nonlinear Optics

Published 2019 View Full Article

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Title
CMOS-Compatible PECVD Silicon Carbide Platform for Linear and Nonlinear Optics
Authors
Keywords
-
Journal
ACS Photonics
Volume -, Issue -, Pages -
Publisher
American Chemical Society (ACS)
Online
2019-03-06
DOI
10.1021/acsphotonics.8b01468

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