Room temperature magnetron sputtering and laser annealing of ultrathin MoS2 for flexible transistors

Published 2018 View Full Article

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Title
Room temperature magnetron sputtering and laser annealing of ultrathin MoS2 for flexible transistors
Authors
Keywords
-
Journal
VACUUM
Volume 160, Issue -, Pages 133-138
Publisher
Elsevier BV
Online
2018-11-10
DOI
10.1016/j.vacuum.2018.10.077

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