Journal
THIN SOLID FILMS
Volume 678, Issue -, Pages 32-41Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2019.03.029
Keywords
Laser irradiation; Titanium dioxide; Silicon dioxide; Sol-gel deposition; Interface; Superhydrophilicity; Photocatalytic activity
Categories
Funding
- Creative Convergence Research Project [ES160020]
- National Research Council of Science Technology
- Korea Institute of Industrial Technology (KITECH) [PUR18100]
- Korea Institute of Energy Technology Evaluation and Planning (KETEP)
- Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea [20152020106380]
- Korea Evaluation Institute of Industrial Technology (KEIT) [20152020106380] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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In this study, we introduce a noble method for the fabrication of highly crystalline hybrid TiO2-SiO2 thin films using laser irradiation under ambient conditions. Upon light absorption at the interface between TiO2 sol-gel film and Si wafer during the laser irradiation process, the TiO2 gel film coated on the Si wafer is transformed into anatase TiO2 film, and the surface of underlying Si wafer is oxidized to a 20.63 mu m thick SiO2 film composed of nano-spheres with average diameter of 24.12 nm. The photocatalytic characteristics of the TiO2-SiO2 hybrid film on methylene blue and its discriminated morphologies are compared with those of a TiO2 film fabricated by conventional thermal annealing. The TiO2-SiO2 hybrid film shows enhanced super-hydrophilicity and superior photocatalytic characteristics, while thermally annealed 0.16 mu m thick TiO2 films exhibit hydrophobic and low photocatalytic properties. The laser assisting process is promising for the fabrication of highly crystalline TiO2-SiO2 hybrid film with super-hydrophilic and photocatalytic characteristics.
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