Fully strained epitaxial Ti1−Mg N(001) layers

Published 2019 View Full Article

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Title
Fully strained epitaxial Ti1−Mg N(001) layers
Authors
Keywords
TiMgN, Epitaxy, Coherent, TiN, MgN, Relaxation, Lattice constant, Dislocation
Journal
THIN SOLID FILMS
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-02-18
DOI
10.1016/j.tsf.2019.02.028

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