On the extraction of resistivity and area of nanoscale interconnect lines by temperature-dependent resistance measurements

Published 2018 View Full Article

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Title
On the extraction of resistivity and area of nanoscale interconnect lines by temperature-dependent resistance measurements
Authors
Keywords
Interconnects, Resistivity, Temperature coefficient of resistivity
Journal
SOLID-STATE ELECTRONICS
Volume 152, Issue -, Pages 72-80
Publisher
Elsevier BV
Online
2018-12-05
DOI
10.1016/j.sse.2018.12.005

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