Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas

Published 2018 View Full Article

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Title
Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas
Authors
Keywords
Hydrogenated microcrystalline silicon, Tailored voltage waveform, Ion bombardment energy, Ion-related interaction
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 190, Issue -, Pages 65-74
Publisher
Elsevier BV
Online
2018-10-30
DOI
10.1016/j.solmat.2018.10.014

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