A sacrificial-layer-free fabrication technology for MEMS transducer on flexible substrate

Published 2019 View Full Article

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Title
A sacrificial-layer-free fabrication technology for MEMS transducer on flexible substrate
Authors
Keywords
Polymer MEMS, Flexible substrates, Grayscale lithography, SU-8 transducers
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 286, Issue -, Pages 202-210
Publisher
Elsevier BV
Online
2019-01-01
DOI
10.1016/j.sna.2018.12.049

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