Non-contact mobility measurements of graphene on silicon carbide

Published 2019 View Full Article

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Title
Non-contact mobility measurements of graphene on silicon carbide
Authors
Keywords
Epitaxial graphene, Metrology, Terahertz time-domain spectroscopy, Mobility, Hall measurement, 2D materials
Journal
MICROELECTRONIC ENGINEERING
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-03-28
DOI
10.1016/j.mee.2019.03.022

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