Hybrid lithography based fabrication of 3D patterns by deep reactive ion etching

Published 2019 View Full Article

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Title
Hybrid lithography based fabrication of 3D patterns by deep reactive ion etching
Authors
Keywords
Hybrid lithography, Deep reactive ion etching, Pattern transfer, 3D profile etching, Taper control
Journal
MICROELECTRONIC ENGINEERING
Volume 209, Issue -, Pages 10-15
Publisher
Elsevier BV
Online
2019-02-28
DOI
10.1016/j.mee.2019.02.009

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