Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia

Published 2019 View Full Article

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Title
Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 37, Issue 2, Pages 020929
Publisher
American Vacuum Society
Online
2019-02-28
DOI
10.1116/1.5081494

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