MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness

Published 2018 View Full Article

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Title
MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 28, Issue 1, Pages 25-35
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-11-29
DOI
10.1109/jmems.2018.2881209

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