First-principle study of ammonia decomposition and nitrogen incorporation on the GaN surface in metal organic vapor phase epitaxy

Published 2018 View Full Article

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Title
First-principle study of ammonia decomposition and nitrogen incorporation on the GaN surface in metal organic vapor phase epitaxy
Authors
Keywords
A3. Metalorganic vapor phase epitaxy, B1. Nitrides, B2. Semiconducting III-V materials, A1. Surfaces, A1. Adsorption, A1. Desorption
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 507, Issue -, Pages 421-424
Publisher
Elsevier BV
Online
2018-11-28
DOI
10.1016/j.jcrysgro.2018.11.031

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