Compensation effects of high oxygen levels in semipolar AlGaN electron blocking layers and their mitigation via growth optimization

Title
Compensation effects of high oxygen levels in semipolar AlGaN electron blocking layers and their mitigation via growth optimization
Authors
Keywords
A1. Impurities, A3. Metalorganic chemical vapor deposition, B1. Nitrides, B2. Semiconducting aluminum compounds, B3. Laser diodes
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 507, Issue -, Pages 118-123
Publisher
Elsevier BV
Online
2018-11-11
DOI
10.1016/j.jcrysgro.2018.11.008

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