Thermoelastic damping in the out-of-plane vibration of a microring resonator with rectangular cross-section

Published 2018 View Full Article

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Title
Thermoelastic damping in the out-of-plane vibration of a microring resonator with rectangular cross-section
Authors
Keywords
MEMS, Microring, Out-of-plane vibration, Thermoelastic damping, Resonator
Journal
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
Volume 151, Issue -, Pages 684-691
Publisher
Elsevier BV
Online
2018-12-18
DOI
10.1016/j.ijmecsci.2018.12.026

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