Quasi-Saturated Arsenic Concentration and Uniform Electron Emission by Regulating Thermal Oxidation of Si Nanotips

Published 2019 View Full Article

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Title
Quasi-Saturated Arsenic Concentration and Uniform Electron Emission by Regulating Thermal Oxidation of Si Nanotips
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 66, Issue 3, Pages 1545-1551
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-01-29
DOI
10.1109/ted.2019.2893332

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