Non-contact polishing of single crystal diamond by ion beam etching

Published 2019 View Full Article

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Title
Non-contact polishing of single crystal diamond by ion beam etching
Authors
Keywords
Single crystal diamond, Polishing, Ion beam etching, Precision engineering, Sub-surface damage
Journal
DIAMOND AND RELATED MATERIALS
Volume 92, Issue -, Pages 248-252
Publisher
Elsevier BV
Online
2019-01-16
DOI
10.1016/j.diamond.2019.01.007

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