Chemical and structural analysis of low-temperature excimer-laser annealing in indium-tin oxide sol-gel films

Title
Chemical and structural analysis of low-temperature excimer-laser annealing in indium-tin oxide sol-gel films
Authors
Keywords
Indium-tin oxide (ITO), Excimer-laser annealing (ELA), X-ray photoemission spectroscopy (XPS), Transmission electron microscopy (TEM)
Journal
CURRENT APPLIED PHYSICS
Volume 19, Issue 2, Pages 168-173
Publisher
Elsevier BV
Online
2018-12-12
DOI
10.1016/j.cap.2018.12.005

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