Top-down fabrication of GaN nano-laser arrays by displacement Talbot lithography and selective area sublimation

Published 2019 View Full Article

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Title
Top-down fabrication of GaN nano-laser arrays by displacement Talbot lithography and selective area sublimation
Authors
Keywords
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Journal
Applied Physics Express
Volume 12, Issue 4, Pages 045007
Publisher
Japan Society of Applied Physics
Online
2019-03-07
DOI
10.7567/1882-0786/ab0d32

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