Intense Pulsed Light Annealing Process of Indium–Gallium–Zinc–Oxide Semiconductors via Flash White Light Combined with Deep-UV and Near-Infrared Drying for High-Performance Thin-Film Transistors

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Title
Intense Pulsed Light Annealing Process of Indium–Gallium–Zinc–Oxide Semiconductors via Flash White Light Combined with Deep-UV and Near-Infrared Drying for High-Performance Thin-Film Transistors
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume -, Issue -, Pages -
Publisher
American Chemical Society (ACS)
Online
2019-03-18
DOI
10.1021/acsami.8b22458

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