Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices

Title
Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices
Authors
Keywords
Ultra-short pulsed laser processing, Microdevices, Supercapacitor, Electronic tongue, Surface-enhanced Raman spectroscopy
Journal
Engineering
Volume 4, Issue 6, Pages 779-786
Publisher
Elsevier BV
Online
2018-11-02
DOI
10.1016/j.eng.2018.10.004

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