Magnetron sputtering deposition of MSb(M=Fe, Ni, Co) thin films as negative electrodes for Li-ion and Na-ion batteries

MSb (M=Fe, Ni, Co) thin films were successfully prepared by magnetron sputtering deposition. The as-prepared MSb (M=Fe, Ni, Co) thin films were characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS), which show that the MSb (M=Fe, Ni, Co) thin films are mixed with different content of Sb phase, and composed of cone-like nanostructures including some plate-like submicroparticles with the size of 100-500 nm. The electrochemical performance indicated that the as-prepared FeSb and NiSb thin films could deliver a high discharge capacity with Li and Na compared with that of CoSb. In addition, the MSb (M=Fe, Ni, Co) thin films also shows a good capacity retention after several ten cycles.