Effect of surface stress induced curvature on the eigenfrequencies of microcantilever plates
Published 2018 View Full Article
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Title
Effect of surface stress induced curvature on the eigenfrequencies of microcantilever plates
Authors
Keywords
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Journal
AIP Advances
Volume 8, Issue 10, Pages 105213
Publisher
AIP Publishing
Online
2018-10-11
DOI
10.1063/1.5053561
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